EFEM (Equipment Front End Module) integrates vacuum/atmospheric wafer transfer robots for high throughput and cleanroom compliance in semiconductor fabrication.
Request InformationEFEM (Equipment Front End Module) integrates vacuum/atmospheric wafer transfer robots for high throughput and cleanroom compliance in semiconductor fabrication.
All Nexa transmission assemblies are manufactured using premium-grade materials and quality-tested in accordance with international ISO and German industrial standards (DIN) to ensure unmatched performance in high-speed automation and rugged environments.
| Specification Feature | Value / Description |
|---|---|
| Wafer Sizes | 200mm / 300mm |
| Cleanliness Class | ISO Class 1 (SEMI) |
| Robot Type | Dual Arm Atmospheric |
| Aligner Repeatability | +/- 0.05 mm |